一、引言离子氮化法是利用在含N_2、H_2等混合稀薄气体的气氛中辉光放电引起的离子轰击而进行氮化的表面硬化法,它具有无公害、省资源、省能源等优点。但是从另一方面来看,过去的离子氮化法有时产生被处理零件的温度分布不均,辉光放电不稳定,以及在形状复杂的部位容易产生氮化不均和严重变形等质量问题和不适用于批量生产的缺点。鉴于这种状况,川崎重工业(株)和株式会社中部电机制作所研究出了新的离子氮化法(以下简称Z处理法,以与过去的离子氮化法相区别)。这种Z处理法保持了过去的离子氮化法的优点,而又克服了其缺点,已用于处理大批量的各种机械零件,取得了很大的成 I. INTRODUCTION Ion nitriding is a surface hardening method that utilizes nitridation by ion bombardment caused by glow discharge in a mixed rare gas atmosphere containing N 2 and H 2. It has the advantages of pollution-free, resource saving and energy saving. However, on the other hand, in the past, the ion nitriding method in the past sometimes resulted in uneven temperature distribution of the treated parts, unstable glow discharge, quality problems such as uneven nitriding and serious deformation in the complicated parts and Does not apply to the shortcomings of mass production. In view of this situation, Kawasaki Heavy Industries Co., Ltd. and Chubu Electric Co., Ltd. have developed a new ion nitriding method (hereinafter abbreviated as Z-treatment method to distinguish it from the past ion nitriding method). This method of Z treatment has retained the advantages of the past ion nitriding method, but also overcome its shortcomings, has been used to handle large quantities of various mechanical parts, made a great deal of