电子能谱技术是近十几年才迅速发展起来的一门新技术。用一束具有一定能量的入射束轰击样品表面,收集并分析各种被激发出来的发射电子的能量,就可以测定原子或分子轨道上电子的束缚能,得到样品表面的许多重要信息。按照所使用的激发源和被测信号的不同,可以构成各种不同的电子能谱。这里介绍其中的一种,即化学分析的电子能谱(Electron Spectrumfor Chemical Analysis),简称ESCA;也可称做X线光电子能谱(X-Ray Photoelectron Spectrum)简称XPS。ESCA的基本原理是利用一定能量的X光照射样品表面,由光电效应而发射出光电子,测定这些光电子的动能就可以直接测定原子的内层电子和价电子的结合能。我们知道,每种元素都具有其独特的原子结构, Electronic energy spectrum technology is a new technology developed rapidly in recent ten years. With a bunch of energy beam incident on the sample surface bombardment, collection and analysis of the various emitted electron energy, you can determine the atomic or molecular orbital binding energy to get a lot of important information on the surface of the sample. Depending on the excitation source used and the signal under test, a variety of different electron spectra can be constructed. One of these is Electron Spectrum for Chemical Analysis (ESCA), also known as X-ray Photoelectron Spectroscopy (XPS). The basic principle of ESCA is to irradiate the sample surface with a certain amount of energy X-rays to emit photoelectrons by the photoelectric effect. The kinetic energy of the photoelectrons can be directly measured to determine the binding energy of the atoms in the inner layer and the valence electrons. We know that each element has its own unique atomic structure,