采用X切LiNbO3 基片 ,设计并研制了脊形结构集成电光Mach Zehnder(M Z)波导调制器 ,实验研制过程包含关键的LiNbO3 基片湿腐蚀刻槽技术和大厚度电极制作技术。研究结果表明 ,脊形结构调制器与传统的平面结构调制器相比 ,在大幅度提高调制带宽方面 ,有着明显的优越性 An X-cut LiNbO3 substrate was used to design and fabricate ridge-structure integrated electro-optic Mach Zehnder (MZ) waveguide modulators. The experimental development involved the key LiNbO3 substrate wet etching groove technology and large thickness electrode fabrication technology. The results show that the ridge structure modulator has obvious advantages over the traditional planar structure modulator in terms of significantly increasing the modulation bandwidth