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YBa_2Cu_3O_(7-x)(YBCO)高温超导材料在高温高场中具有比较高的临界电流密度,因此具有较好的应用前景.通过研究YBCO高温超导薄膜,以提高它的载流能力和超导性能是市场应用的迫切需要.文中所研究的钛酸锶(SrTiO_3)衬底,作为一种钙钛矿结构,不仅具有良好的化学和热稳定性,而且与YBCO高温超导薄膜具有较小的晶格失配度.通过酸腐蚀法和无酸腐蚀处理钛酸锶SrTiO_3(100)(STO)衬底,运用原子力显微镜观察了两种衬底处理方法对钛酸锶衬底表面结构的影响.并在其上用三氟乙酸盐金属有机沉积法(TFA-MOD)制备出临界密度达到约2.50~3.00 MA/cm~2的YBCO高温超导薄膜.通过四引线法表征YBCO高温超导薄膜的Tc达到了均约93K.通过扫描电子显微镜(SEM)分析了衬底处理技术的不同对其表层生长的YBCO高温超导薄膜形貌的影响.通过X射线衍射仪(XRD)固定方位角法表征了不同的衬底处理技术对薄膜内的残余应力的影响.
The YBCO_ (7-x) (YBCO) high temperature superconducting material has a relatively high critical current density in high temperature and high field, so it has a good application prospect.By studying YBCO high temperature superconducting thin film to improve its current carrying capacity and Superconductivity is an urgent need of market application.The strontium titanate (SrTiO_3) substrate studied in this paper, as a kind of perovskite structure, not only has good chemical and thermal stability, but also has the advantages over YBCO high temperature superconducting thin films Small lattice mismatch degree.The SrTiO_3 (100) (STO) substrates were treated by acid etching and acid-free etching.The effects of two substrate treatments on the surface structure of strontium titanate substrates YBCO high temperature superconducting thin films with a critical density of about 2.50 ~ 3.00 MA / cm ~ 2 were prepared by TFA-MOD method.The YBCO high temperature superconducting thin films were characterized by four-lead method The Tc of the lead film reached about 93 K. The effect of different substrate processing techniques on the morphology of the YBCO high temperature superconducting thin film grown on the surface was analyzed by scanning electron microscopy (SEM). The X-ray diffraction (XRD) Angle method characterizes different substrate processing techniques to thin Residual stress therein.