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采用丝网印刷工艺制作了碳纳米管(CNTs)薄膜阴极.经适当能量激光烧蚀后,相互粘连的CNTs随表面粘附有机物的蒸发而分散开,管间隙增加、屏蔽效应减小,使得场发射性能大幅度提高,开启场强降低、场倍增因子β增大.Raman光谱分析表明,随激光能量增加,CNTs表面缺陷增多,成为新的场发射点,对其β增大的贡献加强.相对于两电极结构,三电极中平栅极结构场发射性能经激光烧蚀有更显著的改善.这说明激光烧蚀是提高CNTs场发射性能的有效方法.
Carbon nanotubes (CNTs) thin film cathodes were fabricated by screen printing process.After laser ablation with appropriate energy, the CNTs that adhered to each other were dispersed with the evaporation of organic matter adhering to the surface, and the tube gap increased and the shielding effect decreased, The emission performance is greatly improved, the field strength is reduced and the field multiplication factor β is increased.Raman spectroscopy analysis shows that with the increase of laser energy, the surface defects of CNTs increase and become new field emission points, which contribute to the increase of β. In the two-electrode structure, the field emission performance of the three-electrode mid-plane gate structure is more significantly improved by laser ablation, which shows that laser ablation is an effective method to improve the field emission properties of CNTs.