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在理论分析和实际测试容栅传感器的基础上,改进了以往的等效电路;采用谱分析方法对容栅传感器的激励信号、传递函数和输出电压进行了研究,确定其最佳形式,并根据传感器逆设计方法,给出了传感器的新型电极.
On the basis of theoretical analysis and actual testing of capacitive grid sensor, the equivalent circuit was improved. The excitation signal, transfer function and output voltage of capacitive grid sensor were studied by spectral analysis method, and the best form was determined. Sensor inverse design method gives the new electrode of the sensor.