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用能量75keV、剂量1.0×10~(17)～7.0×10~(17)ions/cm~2的氮离子注入LYl2硬铝合金,研究了注入剂量对材料表面硬度行为的影响,实验发现存在一个剂量阈值D_(1b)=5.0×10~(17)N~+/cm~2,以该剂量的N~+注入可使LYl2硬铝合金的表面硬度得到最大程度的提高.用X-ray衍射仪探测到注入层出现AlN第二相,同时用TRIM算法计算了注入后的氮高子浓度分布和辐射损伤分布.实验和计算结果表明,弥散强化和缺陷强化是N~+注入LYl2硬铝合金的主要强化机制.
The effects of implantation dose on the surface hardness of the material were studied by injecting LY12 hard alloy with 75keV energy and 1.0 × 10 ~ (17) ~ 7.0 × 10 ~ (17) ions / cm ~ D_ (1b) = 5.0 × 10 ~ (17) N ~ + / cm ~ 2, the surface hardness of LYl2 hard aluminum alloy can be maximally increased by the dose of N ~ + implantation.Using X-ray diffraction Instrument to detect the second phase of AlN in the implanted layer and calculate the distribution of nitrogen high concentration and the distribution of radiation damage by using TRIM algorithm.Experiments and calculation results show that the dispersion strengthening and defect strengthening are N ~ + implanted LYl2 hard aluminum alloy The main strengthening mechanism.