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综述了硅材料、形状记忆合金、压电陶瓷、超磁致伸缩材料的微机械用材及其特性，并提出了微材料学概念，同时还介绍了微机械应用．
The material and properties of micromachining materials of silicon, shape memory alloy, piezoelectric ceramic and giant magnetostrictive material are reviewed. The concept of micromaterials is also introduced. The application of micromachining is also introduced.