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提出了一种使用单光栅测量位移的新方法,在该方法中,光栅信号经放大后由图像传感器阵列接收并被传送至计算机,然后通过与其镜像图像叠加的方式得到数字莫尔条纹,最后利用图像传感器像素的空间均匀性对莫尔条纹直接进行细分进而测得位移量。与传统的双光栅莫尔条纹位移测量法相比,该方法完全消除了光栅副层叠间隙,装调更为方便,而且细分成本更低。在阿贝比长仪上对由周期为20μm的光栅和2 048×1 536像素的CMOS图像传感器构成的分辨率为0.04μm的测量系统进行测试,结果表明其最大位移误差优于0.18μm。
A new method of measuring displacement using a single grating is proposed. In this method, the raster signal is amplified and received by the image sensor array and transmitted to the computer. Then, the digital moire fringe is obtained by superposing the image with the mirror image. Finally, The spatial uniformity of the image sensor pixels is directly subdivided into moire fringes and the displacement is measured. Compared with the traditional double-grating moire fringe displacement measurement, this method completely eliminates the grating side-by-layer gap, simplifies setup and adjustment, and has lower subdivision cost. A measuring system with a resolution of 0.04 μm consisting of a grating with a period of 20 μm and a CMOS image sensor with 2048 × 1 536 pixels was tested on an Abbey apparatus and the results showed that the maximum displacement error was better than 0.18 μm.