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研究了不同于台阶形式的具有连续浮雕结构的衍射聚光透镜的激光直写工艺。简要描述了光致抗蚀剂的曝光和显影,对激光直写工艺的机理和工艺过程进行阐述.利用 CLWS-300W/C 极坐标激光直写设备制作出了具有良好面形微结构和较高衍射效率的连续型衍射透镜。研究表明,激光直写技术直写精度高,加工工艺灵活,利用计算机的控制,能够根据光学设计产生的浮雕分布数据制作复杂的、任意形状和外形的微型浮雕结构,非常适合于高精度微光学元件的加工制作.
The laser direct writing process of diffractive condenser lens with continuous relief structure is studied. A brief description of the photoresist exposure and development, the laser direct writing mechanism and process are described.Using CLWS-300W / C polar laser writing device to produce a good surface morphology and high Diffraction efficiency of continuous type diffractive lens. The research shows that the laser direct writing technology has the advantages of high direct writing precision and flexible processing technology. The use of computer control can make miniature relief structures of complex, arbitrary shape and shape according to the relief distribution data generated by the optical design, which is very suitable for high precision micro-optics Component processing production.