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超精密数控车床加工精度的提高不仅依赖于数控装置的运算速度和曲线的拟合精度，同时还依赖于伺服系统的跟踪精度和点位控制精度。现主要讨论一种采用双频激光干涉仪作为位置反馈元件的基于POPOV超稳定性理论的自适应微动控制器的设计和实验过程。实验结果表明，采用本伺服控制系统可以使超精密机床的定位精度提高到纳米级。
The improvement of machining precision of ultra-precision CNC lathe relies not only on the computing speed of CNC device and curve fitting accuracy, but also on the tracking accuracy of servo system and the precision of point control. This paper mainly discusses the design and experimental process of an adaptive micro-controller based on the POPOV super-stability theory using a dual-frequency laser interferometer as a position feedback component. The experimental results show that the servo control system can improve the positioning accuracy of ultra-precision machine tools to nanometer level.