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时栅位移传感器主要采用线切割加工的工艺手段实现产品定子和转子的齿槽加工。线切割加工的精度受限于机床自身精度、钼丝实时补偿能力和切削液纯净度等诸多因素,齿槽等分性精度在一定程度上影响着传感器的最终精度。提出采用精密插齿工艺制备时栅位移传感器,以克服线切割加工齿槽等分性差的问题,并通过开展齿槽等分性对比试验和精度实验进行了齿槽等分性对时栅位移传感器精度影响的分析。实验表明采用插齿工艺的传感器其误差曲线对极间一致性更好,而且误差较同等参数线切割下的减小20%左右。
Grating displacement sensor is mainly used wire cutting process to achieve the product stator and rotor alveolar processing. Wire cutting accuracy is limited by the machine’s own precision, real-time compensation capacity of molybdenum wire and cutting fluid purity and many other factors, the equal accuracy of the alveolar groove affect the final accuracy of the sensor to some extent. A time-shift sensor based on precision gear-tooth technology is proposed to overcome the problem of poor equalization of the tooth-groove of wire-cut machining. By carrying out equal-tooth alienation test and precision experiment, Analysis of the impact of accuracy. The experiment shows that the error curve of the sensor adopting gear-tooth technology has better consistency between the poles and the error is reduced by about 20% compared with the same parameter line cutting.