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本文给出了加热光束光强方波调制和正弦波调制时激光光热光束偏转信号的表达式,分析了偏转信号与样品厚度之间的关系以及其它参数的影响,证明了激光光热光束偏转方法测量样品厚度的可行性,并被实验定性地证实。
In this paper, the expression of the deflection signal of the laser light beam when the square wave modulation and the sine wave modulation of the heating beam is given. The relationship between the deflection signal and the thickness of the sample and the influence of other parameters are analyzed. Method to measure the thickness of the sample is feasible and confirmed experimentally.