本文介绍的扫描投影光刻机光学系统,包括: 两个同心球面镜组成的环带视场投影系统、三个相互垂直平面镜构成的正象反光镜组、全反射式高质量聚光系统和连续变倍观察瞄准系统四部分。对各部分,文中不仅有理论计算和象差分析的描述,同时还给出设计结果和介绍了有关的计算程序。 The scanning projection lithography optical system introduced in this paper includes a ring-shaped field projection system composed of two concentric spherical mirrors, three positive mirror groups consisting of two mutually perpendicular plane mirrors, a total reflection high-quality condenser system and a continuous variable Times observation system aimed at four parts. For each part, the article not only describes the theoretical calculation and the analysis of the aberration, but also gives the design results and the related calculation procedures.