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固体中离子传输和原子碰撞级联的计算机模拟程序ＴＣＩＳ已发展起具有模拟离子 束作用下固体靶中成分动态演变的功能。本文详细介绍动态 ＴＣＩＳ模拟程序的物理模 型及计算方法，给出算例及有关问题的讨论。动态 ＴＣＩＳ可以研究离子束轰击三元靶 的复杂问题：如大剂量离子注入、择优溅射和界面混合等。
Computer simulation program for cascade of ion transport and atom collision in solids TCIS has developed the function of dynamically evolving the composition of solids in simulated solid-state ion beams. This paper introduces the physical model and calculation method of dynamic TCIS simulation program in detail, and gives a discussion of the calculation example and related issues. Dynamic TCIS can study the complex issues of ion beam bombardment of ternary targets: high dose ion implantation, preferential sputtering and interfacial mixing.