无锡微电子科研中心LSI研究开发线是“六五”国家机械电子工业首批550项重点技改项目之一。一九八三年十一月,国家批准该项目。一九八五年八月至一九八六年六月,工艺设备、仪器陆续到货,一九八七年八月投入运行。一九八七年十二月通过国家验收。 研制线以我为主地采用对在线工艺设备分段订货和高档设备拼盘引进相结合的分段拼盘组线方式,做到了少花钱、多办事。该线以我为主地进行了设备安装、调试。设备、仪器经 Wuxi Microelectronics Research Center LSI research and development line is the “Six-Five” national machinery and electronics industry one of the first 550 key technological transformation projects. In November 1983, the state approved the project. From August 1985 to June 1986, process equipment and instruments arrived one after another and were put into operation in August 1987. In December 1987 passed the state inspection. Development line to my main use of the online process equipment segment order and the introduction of high-end equipment, the introduction of a combination of platter group planing line, so that less money, more work. The line to my main equipment installation, commissioning. Equipment, equipment by