利用碳纳米管表面气相生长技术和聚焦离子束(FIB)加工等微纳加工技术,开展了微纳单元的工艺方法研究,探索了基于碳纳米管的微纳结构单元的实验制备工艺。结构表征和电学特性测试结果表明,这种制备工艺可以加工出具有欧姆接触或肖特基接触的微纳单元,为基于碳纳米管的微纳单元的制作提供了一定的思路。 The micro / nanofabrication process of carbon nanotubes (MWNTs) was studied by using micro-nano processing technology such as vapor phase growth of carbon nanotubes and FIB processing, and the experimental preparation of micro / nano unit based on carbon nanotubes was explored. The results of structure characterization and electrical property test show that this preparation process can process micro / nano units with ohmic contacts or Schottky contacts, and provide some ideas for the fabrication of micro / nano units based on carbon nanotubes.