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中国原子能科学研究院的“天光一号”KrF准分子激光系统具有激光宽频带、短波长的特点,通过无阶梯诱导空间非相干技术(EFISI)的光束平滑方法,在靶上获得了不均匀性小于2%的光束。在激光传输和放大过程中,放大器及其增益不均匀性等是影响光束均匀性的主要因素。我们建立部分相干光像传递数学模型并对光束经过放大器的均匀性特性进行模拟研究,通过该模型对改善不均匀性方法进行的探索,有助于在实验中进一步提高光束均匀性。
China Institute of Atomic Energy “Kriging ” KrF excimer laser system has the characteristics of broad-band laser and short wavelength, and is obtained on the target by the beam smoothing method without step-induced spatial inhomogeneous technique (EFISI) Uniformity of less than 2% of the beam. During the laser transmission and amplification, the amplifier and its gain non-uniformity are the main factors affecting the uniformity of the light beam. We establish a mathematical model of partially coherent light transmission and simulate the uniformity of the light beam passing through the amplifier. Exploring the method to improve the nonuniformity through this model will help to further improve the uniformity of the light beam in the experiment.