论文部分内容阅读
采用直流电沉积的方法研究了阴极电流密度的变化(1mA/cm2、3mA/cm2、5mA/cm2、10mA/cm2)对RuO2·nH2O薄膜附着力和形貌的影响,并探讨了RuO2·nH2O电沉积的机理。采用SEM、能谱仪、XRD对薄膜的形貌、元素、物相分别进行了分析,并用粒度分析仪(DELSA440SXAnalyzerControl)对电沉积液的Zeta电位进行了测试。通过实验可以得出:RuO2·nH2O薄膜厚度随着阴极电流密度的增加而增加,薄膜自然干燥失水后,开裂脱落的倾向随电流密度的增加而增大;当阴极电流密度达到10mA/cm2时,自然干燥后薄膜疏松,附着力差。
The effects of the cathode current density (1mA / cm2, 3mA / cm2, 5mA / cm2, 10mA / cm2) on the adhesion and morphology of RuO2 · nH2O thin films were investigated by direct current deposition. The effects of RuO2 · nH2O electrodeposition The mechanism. The morphology, elements and phases of the films were analyzed respectively by SEM, EDS and XRD. The Zeta potential of the electrodeposited solutions was tested by the particle size analyzer (DELSA440SXAnalyzerControl). The experimental results show that the film thickness of RuO2 · nH2O increases with the increase of the cathode current density, and the tendency of the film to peel off increases with the increase of the current density after the film is naturally dried. When the cathode current density reaches 10mA / cm2 After natural drying, the film loose, poor adhesion.