论文部分内容阅读
以0.2 mol/L Sr(OH)2+0.2 mol/L NaOH溶液为电解液,工艺参数分别设置为电流密度2 A/cm2、电流频率100 Hz、反应时间30 min及占空比85%,采用微弧氧化法在工业纯Ti板(99.5%)表面原位生长SrTiO3薄膜,并对薄膜的物相组成,元素分布情况及薄膜介电、铁电性能进行表征。结果表明:所得薄膜主要由四方相SrTiO3构成。薄膜介电常数随频率升高而降低,其在1 kHz条件下的介电常数为317。薄膜中除Sr、Ti、O元素外,还存在Na元素,且Na元素在薄膜与基体结合处出现富集,元素分布的微小波动可能是由微弧氧化孔洞造成。
With 0.2 mol / L Sr (OH) 2 + 0.2 mol / L NaOH as electrolyte, the process parameters were set as current density 2 A / cm2, current frequency 100 Hz, reaction time 30 min and duty ratio 85% The SrTiO3 thin film was grown in situ on the surface of industrial pure Ti plate (99.5%) by micro-arc oxidation. The phase composition, elemental distribution and dielectric and ferroelectric properties of the thin film were characterized. The results show that the obtained thin film mainly consists of tetragonal SrTiO3. The dielectric constant of the film decreases with increasing frequency, and its dielectric constant is 317 at 1 kHz. In addition to Sr, Ti and O elements, Na element exists in the film, and Na element is enriched at the junction of the film and the matrix. The slight fluctuation of elemental distribution may be caused by micro-arc oxidation.