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本文建立了高陡度光学镜面的多段拼接测量方法,将高陡度光学镜面轮廓的测量分割为具有一定重叠区域的数段较短面形轮廓的测量,通过测量系统与被测工件之间的相对旋转与平移运动调整被测工件的姿态实现分段轮廓的测量。之后通过拼接算法将各段面形轮廓拼接起来,重构出被测工件的面形误差。在建立了测量数学模型的基础上,介绍了设计的测量实验系统,并进行了相关实验。仿真与测量实验表明:上述方法能够高精度的重构出被测轮廓。
In this paper, a multi-segment splicing measurement method of high-steep optical mirror is established, which divides the measurement of high-steepness optical specular profile into several sections of short profile with overlapping region. By measuring the distance between the measuring system and the workpiece Relative rotation and translational movement to adjust the attitude of the workpiece to be measured profile segmentation measurements. After that, the stitching algorithm is used to stitch the outline of each section to reconstruct the surface error of the tested workpiece. Based on the establishment of the measurement mathematical model, the designed measurement experiment system is introduced and the relevant experiments are carried out. Simulation and measurement experiments show that the above method can reconstruct the measured contour with high precision.