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利用直流磁控溅射法在室温水冷玻璃衬底上制备出可见光透过率高、电阻率低的掺钛氧化锌(ZnO∶Ti)透明导电薄膜。SEM和XRD研究结果表明,ZnO∶Ti薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向。讨论了薄膜厚度对掺钛氧化锌透明导电薄膜光学、电学性能的影响。当薄膜厚度为835nm时,薄膜具有最低电阻率3.34×10-4Ω.cm。所制备薄膜附着性能良好,在波长为500～800nm的可见光中平均透过率均超过91%,ZnO∶Ti薄膜可用作薄膜太阳电池和液晶显示器的透明电极。
Titanium-doped zinc oxide (ZnO: Ti) transparent conductive thin films with high visible light transmittance and low resistivity were prepared by DC magnetron sputtering on a water-cooled glass substrate at room temperature. The SEM and XRD results show that the ZnO: Ti films are polycrystalline films with hexagonal wurtzite structure and have the preferred c-axis orientation. The effects of film thickness on optical and electrical properties of Ti-doped ZnO films were discussed. When the film thickness is 835nm, the film has the lowest resistivity of 3.34 × 10-4Ω.cm. The prepared films have good adhesion and the average transmittance in the visible light with the wavelength of 500 to 800 nm exceeds 91%. The ZnO: Ti film can be used as a transparent electrode of a thin film solar cell and a liquid crystal display.