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为测量梳齿式微机械加速度计敏感元件的机械参数,提出一种静态电测法。在施力电极上加载直流电压,产生与摆片重力相当的静电引力,根据静电力与重力平衡的关系式,求解出敏感元件的实际机械参数。进行了检测电路的放大性能实验、加速度计重力场静态翻滚实验和摆片的静电吸引实验。实验结果表明,该方法能准确地估算敏感元件的实际机械参数及静态性能。与其他方法相比,静态电测法能较为全面地评估加工工艺对系统性能的影响,不需要特殊的测量环境和仪器设备,能在制造现场使用。
In order to measure the mechanical parameters of the comb-tooth micro-mechanical accelerometer sensor, a static electricity measuring method is proposed. The DC voltage is applied to the force applying electrode to generate the electrostatic attraction corresponding to the gravity of the pendulum. According to the relationship between the electrostatic force and the gravity balance, the actual mechanical parameters of the sensitive element are solved. The experiment of amplifying performance of the detection circuit, the static rolling test of accelerometer gravity field and the electrostatic attraction experiment of the pendulum were carried out. The experimental results show that this method can accurately estimate the actual mechanical parameters and static performance of the sensor. Compared with other methods, the static electric measurement method can more comprehensively evaluate the influence of the processing technology on the system performance, and does not require special measurement environment and equipment, and can be used at the manufacturing site.