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在Ti811钛合金表面分别利用真空阴极电弧沉积技术和磁控溅射技术制备了TiN/Ti复合膜,利用磁控溅射技术制备了TiN/Ti多层膜,测试了膜层的剖面成分分布、膜基结合强度、膜层显微硬度和韧性,对比研究了不同结构膜层对钛合金基材摩擦学性能和高温微动疲劳抗力的影响.结果表明:TiN/Ti复合膜和多层膜均有效提高了钛合金表面的硬度和耐磨性能;电弧沉积TiN/Ti膜层对钛合金高温微动疲劳抗力的改善程度高于磁控溅射TiN/Ti膜层,原因归于电弧沉积TiN/Ti膜层强韧性好、结合强度高,且膜层中的钛颗粒有良好的减摩润滑作用;磁控溅射TiN/Ti多层膜对钛合金高温微动疲劳抗力的改善程度高于磁控溅射TiN/Ti复合膜层,原因是前者韧性高、减摩润滑作用显著.
The TiN / Ti composite films were prepared on the surface of Ti811 titanium alloy by vacuum cathodic arc deposition and magnetron sputtering respectively. The TiN / Ti multilayer films were prepared by magnetron sputtering, The effects of film structure on the tribological properties and fretting fatigue resistance of titanium alloy substrate were studied by comparing the bonding strength, the microhardness and the toughness of the film. The results show that the TiN / Ti composite films and multilayer films The TiN / Ti film deposited by arc deposition has a better improvement on high temperature fretting fatigue resistance than that of magnetron sputtering TiN / Ti film, which is attributed to the arc deposition of TiN / Ti The film has good toughness and high bonding strength, and the titanium particles in the film have a good anti-friction and lubricating effect. The improvement of the fretting fatigue resistance of the titanium alloy by magnetron sputtering TiN / Ti multilayer film is higher than that of the magnetron Sputtering TiN / Ti composite film, because the former high toughness, anti-friction lubrication significantly.