1.前言激光反射镜,环形激光陀螺反射镜和软 X射线光学件,都需要亚纳米粗糙度的超光滑光学表面。这类表面的粗糙度公差,今后将会更严。为了生产这种高质最的超光滑表面,开发一种能够在各种生产环境中,易于进行过程检测表面特征的仪器变得越来越重要。在生产环境下,能够很容易检测超光滑表 1. Introduction Laser mirrors, ring laser gyro mirrors and soft X-ray optics require sub-nano-roughness ultra-smooth optical surfaces. The roughness tolerance of such surfaces will be more stringent in the future. In order to produce such a high quality, ultra-smooth surface, it has become increasingly important to develop an instrument that can easily perform surface-detection of surface features in a variety of production environments. In the production environment, can easily detect ultra-smooth table