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TEM的实验观察表明:O~+注入前,Al薄膜是面心立方结构的多晶体,其晶粒大小为200—600(■)。注入后,Al薄膜晶粒随着O~+注入剂量的增加而明显细化,当O~+注入剂量达到1×10~(17)ion/cm~2时,Al薄膜晶粒细化成19—40(■),此时晶态特征的电子衍射环退化成漫散的晕轮,这说明Al薄膜长程有序消失,转变成短程有序状态,即从晶态过渡到非晶态。ESCA得出这种非晶物质是Al_2O_3。
Experimental observation of TEM shows that the Al thin film is a face-centered cubic polycrystal with a grain size of 200-600 (■) before O ~ + implantation. After injection, the grain size of the Al thin film is obviously refined with the increase of the O ~ + implantation dose. When the implantation dose of O ~ + reaches 1 × 10 ~ (17) ion / cm ~ 2, the Al thin film is refined into 19- 40 (■). At this time, the electron diffraction rings of the crystalline features degenerated into diffuse halo, which indicates that the Al thin film disappears in the long-range order and transitions to the short-range ordered state, that is, the transition from the crystalline state to the amorphous state. ESCA concluded that this amorphous material is Al 2 O 3.