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报道了600门和800门两种ECL超高速移位寄存器;介绍了多晶硅发射极双极晶体管的结构和有关先进工艺,包括深槽隔离、多晶硅发射极、钴硅化物接触和浅结薄基区等;使用这种多晶硅发射极晶体管,3μm特征尺寸设计的19级环形振荡器的平均门延迟小于50ps。给出了600门移位寄存器的电路设计和版图设计,讨论了互连线和双层金属布线对600门和800门移位寄存器的最高工作频率的影响
Reported 600 gate and 800 gate ECL super fast shift register; introduced the structure of polysilicon emitter bipolar transistor and related advanced technology, including deep trench isolation, polysilicon emitter, cobalt silicide contacts and shallow junction base region , Etc .; with this polysilicon emitter transistor, the 19-gate ring oscillator designed in the 3 μm feature size has an average gate delay of less than 50 ps. The circuit design and layout design of 600 shift registers are given. The influence of interconnect and double-layer metal wiring on the maximum operating frequency of 600-gate and 800-gate shift registers is discussed