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电工所九室一组研制的微电流测量仪是针对扫描电子束曝光系统而设计的,是用于大规模集成电路制版曝光前的电子束流的检测,也可用于其它高内阻微弱电流的检测;如半导体器件反向漏电流的检测,以及核物理电子学中微小电流的检测等。该仪器测量范围为10~(-6)A—10~(-10)A,分成10~(-6)A、10~(-7)A、10~(-8)A、10~(-9)A、10~(-10)A等五挡;可检测出1×10~(-12)A的微小电流,测量精度为1%,零点漂移为0.01%(满度
Electrotechnical Institute of nine rooms developed a micro-current meter is designed for scanning electron beam exposure system is used for large-scale integrated circuit plate exposure electron beam detection before, but also can be used for other high-resistance weak current Detection; such as reverse leakage current detection of semiconductor devices, as well as the detection of micro-current in nuclear physics and electronics. The measuring range of the instrument is 10 -6 A -10 -10 A, which is divided into 10 -6 A, 10 -7 A, 10 -8 A, 10 - 9) A, 10 ~ (-10) A and other five blocks; can detect 1 × 10 ~ (-12) A micro-current measurement accuracy of 1%, zero drift of 0.01%