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本文研究了正向磁控规放电的异常作用。指出电场和磁场的排列非完全正交,使得阳极壳层变得不对称,是磁控规放电不稳定的主要因素,并从理论和实验上做了详细地。讨论。认为电极轴和磁场轴间偏离角应小于0.2。
This paper studies the anomalous effect of positive magnetron discharge. It is pointed out that the arrangement of the electric field and the magnetic field are not completely orthogonal, which makes the anode shell asymmetric. It is the main factor of unstable magnetron discharge and has been theoretically and experimentally detailed. discuss. It is considered that the deviation angle between the electrode axis and the magnetic field axis should be less than 0.2.