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尺寸在μm或小于μm的微颗粒样品X射线定量分析的困难不仅表现在理论计算方面,要在电子探针或X射线能谱等电子束显微分析仪上做成功微颗粒定量分析实验也不是一件容易的事。由于颗粒尺寸小(甚至小于电子束直径),束斑位置的稳定性、聚焦程度的好坏及仪器的稳定度都对测量精度带来影响,颗粒越小这种影响越大。
Difficulties in x-ray quantitative analysis of micro-particle samples of size μm or less are not only demonstrated in theoretical calculations but also in the case of successful microparticle quantitation experiments on electron beam microanalysers such as electron microprobe or x-ray spectroscopy An easy thing. Due to the small particle size (even smaller than the diameter of the electron beam), the position stability of the beam spot, the degree of focusing and the stability of the instrument have an impact on the measurement accuracy. The smaller the particle size, the greater the impact.