针对电弧离子镀制备薄膜产生的大颗粒问题,本文主要研究了大颗粒在薄膜中的分布状态。根据大颗粒尺寸和薄膜厚度之间的比例关系,将其划分为三种类型:表面缺位型、镶嵌型和完全贯穿型,其中镶嵌型又划分为表面镶嵌型、中间镶嵌型、镶嵌生长型和重叠镶嵌型等四种类型,并对其形成原因分别进行了分析。 Aiming at the problem of large particles produced by arc ion plating, the distribution of large particles in the film is mainly studied. According to the relationship between the proportion of large particle size and film thickness, it is divided into three types: surface absence type, mosaic type and complete penetration type, in which mosaic type is divided into surface mosaic type, middle mosaic type, mosaic growth type And overlapping mosaic type four types, and its formation were analyzed.