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分析了亚纳米测量外差干涉仪光源的选择和建立。由于Ｈｅ－Ｎｅ激光器在一定的横向磁场下产生横向塞曼效应，直接输出一对正交线偏振光，且其拍频频率较低，成为适于亚纳米测量的激光源。描述了一种基于８０９８单片机的稳频系统，利用模型预测控制算法对此激光器实现了长达１０ｈ的稳频控制。实验表明此横向塞曼激光器的稳频精度达３．３８×１０－１０，所引入的最大非线性偏差为０．２６ｎｍ，表明它可用作亚纳米测量精度外差干涉仪的光源。
The selection and establishment of sub-nanometer measuring heterodyne interferometer light source is analyzed. Due to the transverse Zeeman effect generated by a certain transverse magnetic field, the He-Ne laser directly outputs a pair of orthogonal linearly polarized light with a lower beat frequency, making it a suitable laser source for sub-nanometer measurement. A frequency stabilization system based on 8098 singlechip is described, and the model predictive control algorithm is used to realize frequency stabilization control of the laser for up to 10h. Experimental results show that the frequency stability of the transverse Zeeman laser is 3.38 × 10-10, and the maximum nonlinear deviation introduced is 0.26nm, which indicates that it can be used as the light source for the sub-nanometer measurement accuracy heterodyne interferometer.