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应用相移干涉及Zernike多项式波面拟合技术实现对空间小角度的高精度测量 ,测量精度可达到 0 0 13″。与采用自准直仪、激光干涉小角度测量仪的测量方法相比较 ,测量精度有较大幅度的提高。与测长设备 光栅尺结合使用 ,可同时高精度测量导轨俯仰和偏摆两方向上的直线度
The phase angle interference and the Zernike polynomial wavefront fitting technique are used to realize the high-precision measurement of the small angle of the space with the precision of 0 0 13 ".Compared with the measurement method using the self-collimator and the laser interferometer low-angle measuring instrument, the measurement The accuracy has a more substantial increase.With the length measuring device grating ruler can be used at the same time high-precision measurement of rail pitch and yaw in both directions of straightness