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飞秒激光掩模版加工和修复是近几年来微纳加工领域的研究热点之一,其中精度控制是获得高质量掩模版的关键。在飞秒激光脉冲对铬金属膜和石英基底材料破坏特性的理论基础上,利用一套输出脉宽25 fs、最大功率1 W、中心波长800 nm、重复频率1 kHz的飞秒脉冲激光系统,实验研究了掩模特征单元尺寸与激光能量密度、扫描速度的关系,通过参数优化实现了最小特征尺寸为290 nm的掩模版加工;探讨了特征单元的边缘形貌和底部形貌受能量密度与扫描次数的影响规律,提出了加工参数的选取原则,最终实现了飞秒激光掩模版加工的精度控制和优化。
Femtosecond laser reticle processing and repair is one of the hot topics in the field of micro / nano processing in recent years, of which precision control is the key to obtaining high quality reticle. Based on the theory of femtosecond laser pulses on the destruction characteristics of chromium metal film and quartz substrate, a femtosecond pulse laser system with pulse width 25 fs, maximum power 1 W, center wavelength 800 nm and repetition rate 1 kHz was used. The relationship between the characteristic size of the mask and the laser energy density and the scanning speed was experimentally studied, and the mask processing with the smallest feature size of 290 nm was achieved by the parameter optimization. The edge morphology and the bottom morphology of the characteristic elements were analyzed by energy density and The influence rule of the number of scanning times and the selection principle of the processing parameters were put forward to finally realize the precision control and optimization of the processing of the femtosecond laser reticle.