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介绍了100mm口径反应烧结碳化硅平面反射镜的光学加工工艺流程。按照流程依次介绍了在粗磨成形、细磨抛光和精磨抛光过程中使用的机床、磨具和磨料以及采用的工艺参数和检测方法。介绍了在光学加工各个步骤中应注意的问题。展示了加工后反应烧结碳化硅平面反射镜的实物照片。给出了面形精度和表面粗糙度的检测结果:面形精度(95%孔径)均方根值(RMS)为0.030λ(λ=632.8nm),表面粗糙度RMS值达到了1.14nm(测量区域大小为603 6μmⅹ448 4μm)。
The optical processing flow of 100mm caliber reactively sintered silicon carbide plane mirror is introduced. According to the process, the machine tools, grinding tools and abrasives used in coarse grinding, fine grinding and fine grinding and polishing are introduced in turn according to the process and the adopted process parameters and testing methods. The problems that should be paid attention to in each step of optical processing are introduced. The actual photos of the reactively-bonded silicon carbide planar mirror after processing are shown. The results of surface accuracy and surface roughness are given. The root mean square (RMS) of surface accuracy (95% aperture) is 0.030λ (λ = 632.8nm) and the surface roughness RMS value reaches 1.14nm Area size 603 6 μm ⅹ 448 μm).