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本文提出了拖动分子泵的自泄漏模型，并利用该模型讨论了分子流状态下，拖动泵的槽间泄漏对压缩比的影响及其对策。理论结果与实测值符合得很好。自泄漏模型为发展新一代高抽速、高流量分子泵提供了重要的理论基础。
In this paper, the self-leakage model of molecular pump is proposed. The model is used to discuss the influence of the leakage between slots on the compression ratio and the countermeasures in the state of molecular flow. The theoretical result is in good agreement with the measured value. Since the leakage model for the development of a new generation of high-pumping, high-flow molecular pump provides an important theoretical basis.