一、前言这种测量系统主要是解决精密机械测量,以及大量的有确定形状的曲面加工的质量控制,这类测量的主要困难是需要测定小范围内的长度变化量(如100μm的间隔)以及数量在几百个的多点测量,此外,由于被测点之间距离非常近,所以采用差示变压器、进容转换器 I. INTRODUCTION This kind of measurement system mainly solves the problems of precision mechanical measurement and mass quality control of surface machining with definite shape. The main difficulty of this kind of measurement is the need of measuring the change of length within a small range (such as 100μm interval) and The number of multi-point measurement of hundreds, in addition, the distance between the measured points is very close, so the use of differential transformer, capacity converter