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界面的原子结构特征对材料的性能有很重要的影响.本文介绍用选区电子衍射及高分辨电子显微术研究半导体超晶格、金属多层膜、陶瓷和复合材料相界面的精细结构及界面反应产物结构的结果.对两相之间的取向关系,界面的台阶、小面和粗糙度,界面的原子键合,界面的共格性,错配位错的性质及界面附近弹性应变松弛度,界面附近缺陷结构,电子束辐照或制备工艺条件引起的界面固态化学反应动力学和反应机制以及界面反应产物结构进行了分析和讨论。
The atomic structure of the interface has an important influence on the properties of the material.In this paper, the fine structure and interface of semiconductor superlattices, metal multilayers, ceramics and composites are studied by using the selected electron diffraction and high resolution electron microscopy The results of the structure of the reaction product showed that the orientation relationship between the two phases, the steps of the interface, the facet and roughness, the atomic bonding at the interface, the coherence of the interface, the nature of the misfit dislocation and the elastic strain relaxation near the interface , Defect structure in the vicinity of the interface, electron beam irradiation or preparation process conditions, the reaction kinetics and mechanism of the interface solid-state reaction and the structure of the interface reaction product were analyzed and discussed.