Chemical vapor deposited(CVD) diamond film has broad application foreground in high-tech fields.But polycrystalline CVD self-standing diamond thick film has rough surface and non-uniform thickness that adversely affect its extensive applications.Laser polishing is a useful method to smooth self-standing diamond film.At present,attentions have been focused on experimental research on laser polishing,but the revealing of theoretical model and the forecast of polishing process are vacant.The paper presents a finite element model to simulate and analyze the mechanism of laser polishing diamond based on laser thermal conduction theory.The experimental investigation is also carried out on Nd:YAG pulsed laser smoothing diamond thick film.The simulation results have good accordance with the results of experimental results.The temperature and thermal stress fields are investigated at different incidence angles and parameters of Nd:YAG pulsed laser.The pyramidal-like roughness of diamond thick film leads to the non-homogeneous temperature fields.The temperature at the peak of diamond film is much higher than that in the valley,which leads to the smoothing of diamond thick film.The effect of laser parameters on the surface roughness and thickness of graphite transition layer is also carried out.The results show that high power density laser makes the diamond surface rapid heating,evaporation and sublimation after its graphitization.It is also found that the good polish quality of diamond thick film can be obtained by a combination of large incident angle,moderate laser pulsed energy,large repetition rate and moderate laser pulse width.The results obtained here provide the theoretical basis for laser polishing diamond film with high efficiency and high quality. Chemical vapor deposited (CVD) diamond film has broad application foreground in high-tech fields. But polycrystalline CVD self-standing diamond thick film has rough surface and non-uniform thickness that that adversely affects its extensive applications. Laser polishing is a useful method to smooth self-standing diamond film. At present, attentions have been focused on experimental research on laser polishing, but the revealing of theoretical model and the forecast of polishing process are vacant.The paper presents a finite element model to simulate and analyze the mechanism of laser polishing diamond based on laser thermal conduction theory. The experimental investigation is also carried out on Nd: YAG pulsed laser smoothing diamond thick film. The simulation results have the good with the results of experimental results. The temperature and thermal stress fields are investigated at different incidence angles and parameters of Nd: YAG pulsed laser. The pyramidal-like roughness of diamond thick f ilm leads to the non-homogeneous temperature fields. The temperature at the peak of diamond films is much higher than that in the valley, which leads to the smoothing of diamond thick film. The effect of laser parameters on the surface roughness and thickness of graphite transition layer is also carried out. Results show that high power density laser makes the diamond surface rapid heating, evaporation and sublimation after its graphitization. It is also found that the good polish quality of diamond thick film can be obtained by a combination of large incident angle, moderate laser pulsed energy, large repetition rate and moderate laser pulse width. The results obtained here provide the theoretical basis for laser polishing diamond film with high efficiency and high quality.