【摘 要】
：
采用物理气相沉积工艺在黄铜H62垫片上制备了DLC薄膜,对DLC薄膜进行了拉曼光谱分析和截面形貌观察,测试了薄膜厚度、纳米硬度和结合力,进行了磨擦磨损试验,分析了薄膜的减摩
【机 构】
：
中国船舶重工集团公司第七二五研究所,河南洛阳471023;中国科学院宁波材料技术与工程研究所,中国科学院海洋新材料与应用技术重点实验室,浙江省海洋材料与防护技术重点实验室,浙江宁波315201
论文部分内容阅读
采用物理气相沉积工艺在黄铜H62垫片上制备了DLC薄膜,对DLC薄膜进行了拉曼光谱分析和截面形貌观察,测试了薄膜厚度、纳米硬度和结合力,进行了磨擦磨损试验,分析了薄膜的减摩耐磨性能.结果 表明,在H62铜合金垫片制备碳膜为DLC薄膜,薄膜总厚约2.31 μm,底层厚约0.49 μm.薄膜纳米硬度22.1GPa,薄膜与基体结合良好,结合性能HF1级,结合力41.1 N.H62铜合金垫片制备DLC薄膜后,摩擦系数由0.55降至0.25,磨损率由1.3×10-4 mm3/Nm降至1.1×10-5 mm3/Nm,具有优异的减磨性能和耐磨损性能.装拆10次后,垫片表面DLC薄膜完整,基本无损伤,满足使用要求.
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