ELECTRON BEAM OPTICS CALCULATIONS FOR ROTATIONALLY SYMMETRIC SYSTEMS POSSESSING THIRD ORDER ABERRATI

来源 :Journal of Electronics(China) | 被引量 : 0次 | 上传用户:liuxinjialo
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Based on theory of electron beam optics,the beam optical calculations for animmersion lens and a unipotential lens have been performed.The computational results showthat the beam optical calculations are consistent to the ray tracing and that the beam emi
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