AN ANALYSIS ON CHARACTERISTIC OF MAGNETOELASTICITY OF A MAGNETIC FIELD MICROSENSOR MADE OF CANTHLEVE

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The purpose of this paper is to study the magnetomechanical characteristic of a microsensor which is composed of a cantilevered beam-plate with ferromagnetic films in order to measure the magnetic field from the deformation of plate when the microsensor is located in the magnetic field. To this end, a numerical approach made up of the finite element method for magnetic field and the finite difference method for deflection of the microsensor is proposed to perform the numerical analysis of deflection under magnetoelastic interaction. Some quantitative results of a case study for the magnetoelastic characteristic between the magnetic field and deflection of the microsensor in the magnetic field are given. The results show that this microsensor can be used not only to measure the magnitude of magnetic intensity, but also to possibly monitor the direction of the vector of the magnetic field.
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