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利用等离子体增强磁控溅射离子镀（ＰＥＭＳＩＰ）沉积ＴｉＮ涂层，研究涂层的组织结构和性能。随着氮气分压增加涂层相组成朝着富氮相及其含量增加的方向发展。氮气分压对涂层硬度的影响是由膜层相组成变化引起的，由Ｔｉ２Ｎ和ＴｉＮ两相组成的涂层比ＴＩＮ单相涂层的硬度高。由Ｔｉ２Ｎ和ＴｉＮ组成的刀具涂层使切削力下降。
TiN coatings were deposited by plasma-enhanced magnetron sputter ion plating (PEMSIP) to study the microstructure and properties of the coatings. With the increase of partial pressure of nitrogen, the phase composition of coating developed toward the nitrogen-rich phase and its content increased. The influence of partial pressure of nitrogen on the hardness of the coating is caused by the change of the phase composition of the coating. The coating composed of two phases of Ti2N and TiN has a higher hardness than the single-phase coating of TIN. Tooling consisting of Ti2N and TiN reduces cutting forces.