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现代聚焦电子束、聚焦离子束装置大都采用自动聚焦、自动消象散技术，本文对目前常用的几种自动聚焦、自动消象散技术加以总结，介绍了其原理及实现方法。
Most of the modern focused electron beam and focused ion beam devices adopt automatic focusing and automatic elimination and astigmatism techniques. In this paper, we summarize several commonly used automatic focusing and automatic ablation techniques, and introduce their principles and implementation methods.