日前,美国航空航天局(NASA)针对超高敏感度的天文望远镜应用,正在研究最新的涂层材料,用于保护NASA迄今为止最为强大的一个镜面项目的背面铝基材,以便使该项目最终得以有效运转。而NASA研究的方法之一是采用物理气相沉积方法将二氟化氙的薄涂层应用到铝表面上,所形成的氟离子将有效防止铝氧化。而另一种方法是通过离子辅助物理气相沉积或原子层沉积方法,将三氯化铝直接涂覆在基材上。据NASA介绍,此前项目研究团队最接近目标的方法是通过物理气相沉积工 Recently, NASA is investigating the latest coating materials for ultrahigh-sensitivity telescope applications to protect the backside aluminum substrate of one of NASA’s most powerful mirror projects to date to finalize the project To be effective operation. However, one of NASA’s research methods is to apply a thin coating of xenon difluoride to the aluminum surface by physical vapor deposition, and the resulting fluoride ion will effectively prevent aluminum oxidation. Alternatively, aluminum trichloride can be applied directly to the substrate by ion assisted physical vapor deposition or atomic layer deposition. According to NASA, the closest approach to the project’s research team is through physical vapor deposition