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本文描述SAW振荡器对外界热和机械扰动的敏感性.这种敏感性来自晶体SAW与静偏置发生耦合的非线性弹性.用Mindlin多项式近似计算了薄基片中的静偏置,然后计算非线性耦合系数.利用考虑到SAW穿透深度的微扰法导出频率漂移.研究了三种类型的敏感器:温度,力和压力.温度敏感器采用灵敏度高,线性好的双旋石英片.研究了弯曲力和单轴力对矩形片的影响,以及径向力随方位角对图片的影响.研究了厚片和薄片的静水压灵敏度.前者的灵敏度小,后者的频率漂移很大.
This paper describes the sensitivity of the SAW oscillator to external thermal and mechanical perturbations, derived from the nonlinear elasticities of the crystal SAW coupled with the static bias. The static bias in a thin substrate is approximated by a Mindlin polynomial and then calculated Non-linear coupling coefficient The frequency drift is derived by the perturbation method considering the penetration depth of the SAW.Three types of sensors are studied: temperature, force and pressure.The temperature sensor adopts double-spin quartz with high sensitivity and good linearity. The influence of bending force and uniaxial force on rectangular plates and the effect of radial force with azimuth angle on the pictures are studied.The hydrostatic sensitivity of thick and thin plates is studied.The sensitivity of the former is small and the frequency drift of the latter is large .