通过三点弯方法研究普通和微氮硅单晶在室温下的机械强度 ,以及它们的高温抗弯强度 .实验发现 ,由于氮的掺入 ,硅片室温下的机械强度有明显的改善 ,同时证实了高温下氮对位错的钉扎作用 ;研究还指出 ,硅片表面状态和晶向对室温时机械强度也存在影响 .对室温下氮杂质增强机械强度的可能机理进行了探讨 The three-point bending method was used to study the mechanical strength of common and micro-N-Si single crystals at room temperature and their high temperature bending strength. The experimental results show that the mechanical strength of Si wafer at room temperature is improved obviously due to the incorporation of nitrogen, Confirmed the pinning effect of nitrogen on dislocation at high temperature.The study also pointed out that the surface state and orientation of silicon also have an influence on the mechanical strength at room temperature.The possible mechanism of enhancing the mechanical strength of nitrogen impurities at room temperature