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采用YAG雷射制程技术制备微流道,不但处理速度快、低污染、低耗费,硅芯片经YAG雷射表面处理后呈现微流道,实验得出雷射光斑直径受频率及电流强度所控制,随着频率减少及电流强度增加而变大,微流道宽度随着频率减少及电流强度增加而变宽,扫描速度对微流道宽度无明显影响。微流道深度随着频率及电流强度增加而变深,随着扫描速度增加而变浅。微流道热影响区在各制程参数下,其影响的变化差异并不明显,微流道表面粗糙度随着频率及电流强度的增加而变大,随着扫描速度的增加而降低,最佳制程参数为扫描速度10mm/s、电流10A及频率1KHz,其微流道表面及轨迹最为平整,且几何形狀最佳。
The preparation of microchannels by YAG laser process technology not only has the advantages of fast processing speed, low pollution and low cost, but also presents the microchannel after YAG laser surface treatment. The experimental results show that laser spot diameter is controlled by frequency and current intensity , With the decrease of frequency and the increase of current intensity, the width of microchannel becomes wider with the decrease of frequency and the increase of current intensity. The scanning speed has no obvious effect on the width of microchannel. The depth of microchannel becomes deeper as the frequency and current intensity increase, and becomes shallower as the scanning speed increases. The influence of process parameters on microchannel heat-affected zone is not obvious. The surface roughness of microchannel becomes larger with the increase of frequency and current intensity, and decreases with the increase of scanning speed, which is the best Process parameters for the scanning speed of 10mm / s, current 10A and frequency 1KHz, the micro-channel surface and trajectory is the most smooth, and the best geometry.