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We report the application of customer-built scanning thermal microscopy (SThM) based on a commercial atomic force microscope to investigate local thermal inhomogeneity of ZnO varistors.The so-called 3ω method, generally used for measuring macroscale thermal conductivity, is set up and integrated with an atomic force microscope to probe the nanoseale therma J property.Remarkably, thermal contrasts of ZnO varistors are firstly imaged by the SThM, indicating the uniform distribution of spinel phases at triple points.The frequency-dependent thermal signal of ZnO varistors is also studied to present quantitative evaluation of local thermal conductivity of the sample.