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为了实现滑块内滚道型面精度的快速准确测量,提出一种基于激光三角位移传感器倾斜测量的方法。对该方法的算法进行推理与验证,同时借助高精度圆棒进行实验验证。根据测量系统的特征与滑块内滚道的形状,建立相对应的模型。设计相应的算法,计算滑块内滚道的半径,并对测量过程中的误差来源进行标定补偿。在内滚道轮廓算法的基础上,计算滑块内滚道的轴线相对基准面的位置与平行度。介绍该方案的验证性实验并分析结果。实验结果表明:标准圆棒的测量精度为3.75μm,标准差在2μm以内。实验结果满足5μm的测量精度要求,且该测量方式对标定件与待测件没有位姿要求,具备一定的推广性。
In order to achieve the rapid and accurate measurement of raceway profile accuracy, a method of tilt measurement based on laser triangulation displacement sensor was proposed. The method of algorithm for reasoning and verification, at the same time with high-precision round rod experimental verification. According to the characteristics of the measuring system and the shape of the inner track of the slider, a corresponding model is established. The corresponding algorithm is designed to calculate the radius of the inner raceway of the slider and calibrate the source of the error in the measurement process. On the basis of the inner race contour algorithm, the position and parallelism of the axis of the inner race of the slider with respect to the reference plane are calculated. Describe the program’s confirmatory experiments and analyze the results. The experimental results show that: the standard round rod measurement accuracy of 3.75μm, standard deviation within 2μm. Experimental results to meet the 5μm measurement accuracy requirements, and the measurement of the calibration of the workpiece and the test piece no pose requirements, with a certain degree of generalization.